EPJ Web Conf.
Volume 238, 2020EOS Annual Meeting (EOSAM 2020)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 6- Frontiers in Optical Metrology|
|Published online||20 August 2020|
Picometer mechanical displacement measurement using heterodyne interferometer with phase-locked loop
Department of Mechanical Engineering, Nagaoka University of Technology, 940-2188 Kamitomioka, Nagaoka, Niigata, Japan
* Corresponding author: email@example.com
Published online: 20 August 2020
In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interferometer with a phase-locked loop (PLL). A heterodyne light source for the interferometer is implemented with a frequency stabilized HeNe laser and two acousto-optic modulators. A real time phase measurement is performed by the PLL, whose software is programmed in a field-programmable gate array (FPGA). A stiff parallel spring stage combined with a high-voltage piezoelectric actuator is used to generate picometer-order mechanical motion. With the above implementations, mechanical displacement of 10 picometer or less can be measured.
© The Authors, published by EDP Sciences, 2020
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