| Issue |
EPJ Web Conf.
Volume 238, 2020
EOS Annual Meeting (EOSAM 2020)
|
|
|---|---|---|
| Article Number | 06003 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 6- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202023806003 | |
| Published online | 20 August 2020 | |
https://doi.org/10.1051/epjconf/202023806003
Picometer mechanical displacement measurement using heterodyne interferometer with phase-locked loop
Department of Mechanical Engineering, Nagaoka University of Technology, 940-2188 Kamitomioka, Nagaoka, Niigata, Japan
* Corresponding author: masatoaa@vos.nagaokaut.ac.jp
Published online: 20 August 2020
In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interferometer with a phase-locked loop (PLL). A heterodyne light source for the interferometer is implemented with a frequency stabilized HeNe laser and two acousto-optic modulators. A real time phase measurement is performed by the PLL, whose software is programmed in a field-programmable gate array (FPGA). A stiff parallel spring stage combined with a high-voltage piezoelectric actuator is used to generate picometer-order mechanical motion. With the above implementations, mechanical displacement of 10 picometer or less can be measured.
© The Authors, published by EDP Sciences, 2020
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