| Issue |
EPJ Web Conf.
Volume 335, 2025
EOS Annual Meeting (EOSAM 2025)
|
|
|---|---|---|
| Article Number | 08002 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting - Optical Materials | |
| DOI | https://doi.org/10.1051/epjconf/202533508002 | |
| Published online | 22 September 2025 | |
https://doi.org/10.1051/epjconf/202533508002
Amorphous silicon carbide for microstructured optics
1 Technische Universität Ilmenau, Technische Optik, Postfach 100565, 98684 Ilmenau, Germany
2 5microns GmbH, Margarethenstraße 6, 98693 Ilmenau, Germany
* e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.
Published online: 22 September 2025
Abstract
Amorphous silicon carbide offers unique properties for the optimization of microstructured optical elements. We present a study on the technological processing, the resulting material properties as well as potential applications.
© The Authors, published by EDP Sciences, 2025
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.