| Issue |
EPJ Web of Conferences
Volume 33, 2012
2nd European Energy Conference
|
|
|---|---|---|
| Article Number | 02010 | |
| Number of page(s) | 8 | |
| Section | Sciences for Energy | |
| DOI | https://doi.org/10.1051/epjconf/20123302010 | |
| Published online | 02 October 2012 | |
https://doi.org/10.1051/epjconf/20123302010
New DRIE-Patterned Electrets for Vibration Energy Harvesting
CEA, LETI, Minatec Campus, 17 av des martyrs, Grenoble, France
This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m2 on 1.1μm-thick layers, even with fine patterning and harsh temperature conditions (up to 250°C). This paves the way to new e-VEH designs and manufacturing processes.
© Owned by the authors, published by EDP Sciences, 2012
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