Issue |
EPJ Web of Conferences
Volume 33, 2012
2nd European Energy Conference
|
|
---|---|---|
Article Number | 04006 | |
Number of page(s) | 9 | |
Section | Networks | |
DOI | https://doi.org/10.1051/epjconf/20123304006 | |
Published online | 02 October 2012 |
https://doi.org/10.1051/epjconf/20123304006
Cryogenic thermal storage system for discontinuous industrial vacuum processes
Dipartimento di Energetica, Università di Firenze, Via S. Marta 3, 50139, Firenze, Italy
a e-mail: mara.bruzzi@unifi.it
Phase Change Materials are proposed for refrigerating systems in discontinuous industrial vacuum processes where temperatures as low as −140 ÷ −100°C are necessary within time-frames representing 10÷20% of total operating time. An application is proposed for cooling systems used in a Physical Vapour Deposition (PVD) apparatus. A prototype has been manufactured which couples a cryopump with a reservoir filled with MethylCycloPentane (MCP-C6H12) and a distribution line where nitrogen in the gaseous state is flowing. Preliminary tests show that temperatures of about −120°C are actually achieved within time windows compatible with PVD applications.
© Owned by the authors, published by EDP Sciences, 2012
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