| Issue |
EPJ Web of Conferences
Volume 48, 2013
OAM 2012 – Optics and Measurement International Conference
|
|
|---|---|---|
| Article Number | 00018 | |
| Number of page(s) | 4 | |
| DOI | https://doi.org/10.1051/epjconf/20134800018 | |
| Published online | 03 May 2013 | |
https://doi.org/10.1051/epjconf/20134800018
Photonometers for coating and sputtering machines
Institute of Plasma Physics ASCR
v.v.i., TOPTEC, Sobotecká
1660, 51101
Turnov, Czech
Republic
The concept of photonometers (alternative name of optical monitor of a vacuum deposition process) for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.
© Owned by the authors, published by EDP Sciences, 2013
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