EPJ Web Conf.
Volume 159, 2017XIV All-Russian School-Conference of Young Scientists with International Participation “Actual Problems of Thermal Physics and Physical Hydrodynamics”
|Number of page(s)||5|
|Published online||25 October 2017|
The influence of precursor gas pressure on structure and properties of fluoropolymer coatings by hot wire CVD
Kutateladze Institute of Thermophysics SB RAS, 630090, Lavrentyev Str. 1, Novosibirsk, Russia
2 Nikolaev Institute of Inorganic Chemistry SB RAS, 630090, Lavrentyev Str. 3, Novosibirsk, Russia
* Corresponding author: firstname.lastname@example.org
Published online: 25 October 2017
In this paper we investigated the deposition process of the fluoropolymer coatings by the method of Hot Wire Chemical Vapor Deposition. The dependence of precursor gas pressure on deposition rate, structure and properties of the formed film was investigated. The study has shown that the increasing of precursor gas pressure leads to change of the film structure from porous to continuous with globules and further to solid that have different wettability. Depending on the mode of deposition was obtained the fluoropolymer coating with different structure: the wetting angle changed from 60 to 170°. A mechanism of the formation of fluoropolymer coating was discussed.
© The authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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