| Issue |
EPJ Web Conf.
Volume 162, 2017
International Conference on Applied Photonics and Electronics 2017 (InCAPE2017)
|
|
|---|---|---|
| Article Number | 01041 | |
| Number of page(s) | 5 | |
| DOI | https://doi.org/10.1051/epjconf/201716201041 | |
| Published online | 22 November 2017 | |
https://doi.org/10.1051/epjconf/201716201041
The influence of design parameters on the performance of FBAR in 10–14 GHz
1
School of Microelectronic Engineering, Universiti Malaysia Perlis, Pauh Putra Campus 02600 Arau, Perlis, Malaysia
2
School of Material Engineering, Universiti Malaysia Perlis, Jejawi Campus 02600 Arau, Perlis, Malaysia
* Corresponding author: izza@unimap.edu.my
Published online: 22 November 2017
This research presents the analysis of the influence of design parameters on the performance of film bilk acoustic wave resonator (FBAR) working from 10 GHz to 14 GHz. The analysis is done by implementing one-dimensional (1-D) modellings, which are 1-D Mason model and Butterworth Van Dyke (BVD) model. The physical parameters such as piezoelectric materials and its thickness, and size of area affecting the characteristics of the FBAR are analyzed in detail. Zinc oxide (ZnO) and aluminum nitride (AlN) are chosen as the piezoelectric materials. The resonance area is varied at 25μm×25μm to 35μm×35μm. From the analysis, it is found that as the frequency increases, the thickness of the piezoelectric material decreases. Meanwhile, the static capacitance increases as the frequency increases. It is also found that as the area increases, the electrical impedance and static capacitance also increases.
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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