EPJ Web Conf.
Volume 162, 2017International Conference on Applied Photonics and Electronics 2017 (InCAPE2017)
|Number of page(s)||5|
|Published online||22 November 2017|
Hydrothermal growth of titania nanowires for SAW device sensing area
Center of Diploma Studies, Universiti Malaysia Perlis, 02100 Padang Besar, Perlis, Malaysia.
2 School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP), 02600 Arau, Perlis, Malaysia
3 NANO-SciTech Centre, Institute. of Science University Technology (UiTM), 40450 Shah Alam, Selangor, Malaysia
4 Institute of Nano Electronic Engineering,Universiti Malaysia Perlis (UniMAP) 01000 Kangar, Perlis Malaysia.
* Corresponding author: email@example.com
Published online: 22 November 2017
Synthesis of titania or titanium dioxide (TiO2) is attracted to energy and environmental applications. Here, the growth of nanostructure TiO2 nanowires on Si (100) substrates by using the two-step method. Different seed layers of TiO2 were deposited by spin coating and annealing, followed by the growth of TiO2 nanowires by using the hydrothermal method. The sol-gel technique was used in preparing the TiO2 solution for the thin film deposition purpose. Acetic acid, hydrochloric acid and tris (2-aminoethyl) amine were used as a stabilizer to synthesize three different TiO2 seed layers. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and structure of the thin film and TiO2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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