Hydrothermal growth of titania nanowires for SAW device sensing area

¹ Center of Diploma Studies, Universiti Malaysia Perlis, 02100 Padang Besar, Perlis, Malaysia.
² School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP), 02600 Arau, Perlis, Malaysia
³ NANO-SciTech Centre, Institute. of Science University Technology (UiTM), 40450 Shah Alam, Selangor, Malaysia
⁴ Institute of Nano Electronic Engineering,Universiti Malaysia Perlis (UniMAP) 01000 Kangar, Perlis Malaysia.

^* Corresponding author: rosydizakaria@unimap.edu.my

Published online: 22 November 2017

Abstract

Synthesis of titania or titanium dioxide (TiO₂) is attracted to energy and environmental applications. Here, the growth of nanostructure TiO₂ nanowires on Si (100) substrates by using the two-step method. Different seed layers of TiO2 were deposited by spin coating and annealing, followed by the growth of TiO₂ nanowires by using the hydrothermal method. The sol-gel technique was used in preparing the TiO₂ solution for the thin film deposition purpose. Acetic acid, hydrochloric acid and tris (2-aminoethyl) amine were used as a stabilizer to synthesize three different TiO2 seed layers. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and structure of the thin film and TiO₂ nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).