| Issue |
EPJ Web of Conferences
Volume 167, 2018
Plasma Physics by Laser and Applications (PPLA 2017)
|
|
|---|---|---|
| Article Number | 03001 | |
| Number of page(s) | 5 | |
| Section | Laser Plasma Diagnostics | |
| DOI | https://doi.org/10.1051/epjconf/201816703001 | |
| Published online | 09 January 2018 | |
https://doi.org/10.1051/epjconf/201816703001
Nanoimaging using soft X-ray and EUV laser-plasma sources
Institute of Optoelectronics, Military University of Technology, 2, Kaliskiego Street, 00-908 Warsaw, Poland
* Corresponding author: wachulak@gmail.com
Published online: 9 January 2018
In this work we present three experimental, compact desk-top imaging systems: SXR and EUV full field microscopes and the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources based on a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths are capable of imaging nanostructures with a sub-50 nm spatial resolution and short (seconds) exposure times. The SXR contact microscope operates in the “water-window” spectral range and produces an imprint of the internal structure of the imaged sample in a thin layer of SXR sensitive photoresist. Applications of such desk-top EUV and SXR microscopes, mostly for biological samples (CT26 fibroblast cells and Keratinocytes) are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.