| Issue |
EPJ Web Conf.
Volume 215, 2019
EOS Optical Technologies
|
|
|---|---|---|
| Article Number | 05004 | |
| Number of page(s) | 2 | |
| Section | Manufacturing, Tolerancing and Testing of Optical Systems (MOS) – Session 5 | |
| DOI | https://doi.org/10.1051/epjconf/201921505004 | |
| Published online | 10 September 2019 | |
https://doi.org/10.1051/epjconf/201921505004
Study of footprint variations of CCP considering machine kinematics
1
Laboratory for Ultra Precision Surfaces, University of Huddersfield, G6, TechSpace One, SciTech Daresbury Campus, Keckwick Lane, Daresbury, UK, WA4 4AB
2
FISBA AG, Rorschacher Str. 268, CH-9012 St. Gallen, Switzerland
3
University College London, Dpt Physics and Astronomy, Gower St, London, WC1E 6BT, UK
4
Zeeko Ltd, CoalVille, Leicestershire, LE67 3FW, UK
* Corresponding author: author@e-mail.org
Published online: 10 September 2019
This paper investigates the differentiation between machine’s static and dynamic footprint (FP). The results have shown progressing footprint variation related to tool’s tilt angle. Continuous tilt angle compensation has been applied to offset this effect.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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