| Issue |
EPJ Web Conf.
Volume 220, 2019
XIII International Workshop on Quantum Optics (IWQO-2019)
|
|
|---|---|---|
| Article Number | 02009 | |
| Number of page(s) | 2 | |
| Section | Oral talks | |
| DOI | https://doi.org/10.1051/epjconf/201922002009 | |
| Published online | 25 October 2019 | |
https://doi.org/10.1051/epjconf/201922002009
Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
1
Moscow State Pedagogical University, 119991 Moscow, Russia
2
National Research University Higher School of Economics, 101000 Moscow, Russia
3
Zavoisky Physical-Technical Institute of the Russian Academy of Sciences, 420029 Kazan, Russia
* Corresponding author: aprohodcov@hse.ru
Published online: 25 October 2019
The dependence of the efficiency of the focusing grating couplers on the period and filling factor before and after deposition of the upper silicon oxide layer was experimentally studied. The obtained data are of practical importance for tunable integrated-optical devices based on silicon nitride platform.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.