EPJ Web Conf.
Volume 238, 2020EOS Annual Meeting (EOSAM 2020)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 1- Silicon Photonics and Guided-Wave Optics|
|Published online||20 August 2020|
Deformed microcavities with very high Q-factors and directional farfield emission
1 FG Technische OptikInstitut für Mikro- und Nanotechnologien MacroNano ®, TU Ilmenau
2 FG Computational Physics, TU Ilmenau
3 Intstitut für Physik, Technische Universität Chemnitz
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Published online: 20 August 2020
We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 105
© The Authors, published by EDP Sciences, 2020
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