| Issue |
EPJ Web Conf.
Volume 238, 2020
EOS Annual Meeting (EOSAM 2020)
|
|
|---|---|---|
| Article Number | 12001 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 13- Advances and Applications of Optics and Photonics | |
| DOI | https://doi.org/10.1051/epjconf/202023812001 | |
| Published online | 20 August 2020 | |
https://doi.org/10.1051/epjconf/202023812001
Transient Dynamical-Thermal-Optical System Modeling and Simulation
Institute of Engineering and Computational Mechanics, Pfaffenwaldring 9, 70569 Stuttgart, Germany
* e-mail: luzia.hahn@itm.uni-stuttgart.de
** e-mail: peter.eberhard@itm.uni-stuttgart.de
Published online: 20 August 2020
In this work, methods and procedures are investigated for the holistic simulation of the dynamicalthermal behavior of high-performance optics like lithography objectives. Flexible multibody systems in combination with model order reduction methods, finite element thermal analysis and optical system analyses are used for transient simulations of the dynamical-thermal behavior of optical systems at low computational cost.
© The Authors, published by EDP Sciences, 2020
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