EPJ Web Conf.
Volume 266, 2022EOS Annual Meeting (EOSAM 2022)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 5- Resonant Nanophotonics|
|Published online||13 October 2022|
Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings
1 Technische Universität Ilmenau, Fachgebiet Technische Optik, Postfach 100565, 98684 Ilmenau, Germany
2 Technische Universität Ilmenau, Fachgebiet Technische Physik 1, Postfach 100565, 98684 Ilmenau, Germany
3 Technische Universität Ilmenau, Institut für Mikro- und Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany
* e-mail: email@example.com
Published online: 13 October 2022
Nano-structuring enables us to add additional degrees of freedom to the design of optical elements. Especially the possibility of controlling the polarization is of great interest in the field of nano-structured optics. For being able to exploit the whole range of form-birefringent phase shifts, the aspect ratios of the resulting element are typically much higher than the aspect ratios of conventional diffractive optical elements (DOEs), which does not only pose a challenge on fabrication but also on characterization. We evaluate several well-established approaches for the nondestructive characterization, including Müller-Matrix-Ellipsometry, measurement of the diffraction efficiencies, scattering measurements and calibration with rigorous coupled-wave modelling. The goal is to understand the challenges with all these techniques and combine them to a reliable method for structural reconnaisance of high aspect ratio nanostructures.
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