| Issue |
EPJ Web Conf.
Volume 309, 2024
EOS Annual Meeting (EOSAM 2024)
|
|
|---|---|---|
| Article Number | 02017 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 2- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202430902017 | |
| Published online | 31 October 2024 | |
https://doi.org/10.1051/epjconf/202430902017
Subsampling Schemes for Compressive Nearfield Spectroscopy
Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany
* Corresponding author: bernd.kaestner@ptb.de
Published online: 31 October 2024
Nearfield spectroscopy is crucial for characterizing micro- and nanostructures and it often requires hyperspectral imaging, where at each spatial point a full spectrum is recorded. Due to its combination with an atomic force microscope, nearfield hyperspectral imaging is serial in nature and results in long acquisition times and stability challenges, also restricting its industrial use. In this work, we employ a subsampling strategy combined with low-rank matrix reconstruction in a commercial nearfield spectroscopy system to significantly shorten measurement acquisition times.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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