Tunable superconducting microwave resonator for quantum transduction

¹ Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA
² Department of Quantum and Computer Engineering, Delft University of Technology, Netherlands
³ Department of Physics, Harvard University, Cambridge, Massachusetts 02138, USA
⁴ School of Electrical, Computer, and Energy Engineering, Arizona State University, Tempe, AZ 85287, USA

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^5† These authors contributed equally to this work.

Published online: 22 September 2025

Abstract

This work presents a superconducting microwave resonator that is both frequency tunable and compatible with photolithography. This design is well-suited for integration with electro-optic devices. We demonstrate tuning ranges exceeding 500 MHz, using a bulk permanent magnet, and 100 MHz, using planar coils, under moderate magnetic fields (below 5 mT).