Coherent Ray Tracing Simulation Of Non-Imaging Laser Beam Shaping With Multi-Aperture Elements

Raoul Kirner; Wilfried Noell; Toralf Scharf; Reinhard Voelkel

doi:10.1051/epjconf/201921501001

All issues

Volume 215 (2019)

EPJ Web Conf., 215 (2019) 01001

References

Open Access

Issue		EPJ Web Conf. Volume 215, 2019 EOS Optical Technologies


Article Number		01001
Number of page(s)		2
Section		Manufacturing, Tolerancing and Testing of Optical Systems (MOS) – Session 1
DOI		https://doi.org/10.1051/epjconf/201921501001
Published online		10 September 2019

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[1] P. Rai-Choudhury, ed., Handbook of microlithography, micromachining, and microfabrication, Volume 1 (SPIE Press, 1997) [Google Scholar]

[2] R. Kirner, A. Vetter, D. Opalevs, C. Gilfert, M. Scholz, P. Leisching, T. Scharf, W. Noell, C. Rockstuhl, R. Voelkel, Opt. Express 26(2), 730 (2018) [PubMed] [Google Scholar]

[3] R. Völkel, U. Vogler, A. Bich, P. Pernet, K. J. Weible, M. Hornung, R. Zoberbier, E. Cullmann, L. Stürzebecher, T. Harzendorf, U. D. Zeitner, Opt. Express 18, 20968–20978 (2010) [PubMed] [Google Scholar]

[4] F. M. Dickey, ed., Laser beam shaping: Theory and Techniques 2nd Ed., chap. 10 (CRC Press, 2017) [Google Scholar]

[5] R. Völkel, K. J. Weible: Proc. SPIE 7102, 1020J (2008) [Google Scholar]

[6] J. Arnaud, Appl. Opt. 24, 538-543 (1985) [CrossRef] [PubMed] [Google Scholar]

[7] A. W. Greynolds, Proc. SPIE 0679 (1986) [Google Scholar]

[8] J. W. Goodman, Statistical Optics 2nd Ed., chap. 7.7 (Wiley, 2015) [Google Scholar]

[9] M. Sjödahl, L. R. Benckert, Appl. Opt. 33(31), 7461-7471 (1994) [CrossRef] [PubMed] [Google Scholar]

[10] R. Kirner, A. Vetter, D. Opalevs, M. Scholz, P. Leisching, T. Scharf, W. Noell, C. Rockstuhl, R. Voelkel, Proc. SPIE 10587, 105870W (2018) [Google Scholar]