Open Access
| Issue |
EPJ Web Conf.
Volume 273, 2022
Journées Nationales des Spectroscopies de PhotoEmission (JNSPE 2022)
|
|
|---|---|---|
| Article Number | 01011 | |
| Number of page(s) | 4 | |
| DOI | https://doi.org/10.1051/epjconf/202227301011 | |
| Published online | 02 December 2022 | |
- Howard R. Huff, Characterization and Metrology for ULSI Technology: 2000 International Conference, edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, W. M. Bullis, P. J. Smith, and E. M. Secula, 2001 American Institute of Physics [Google Scholar]
- Moore, Gordon E. (1965-04-19). Electronics, Vol. 38, Number 8, April 19, 1965 [Google Scholar]
- https://en.wikichip.org/wiki/technology_node [Google Scholar]
- P. Mack, R.G. White, J. Wolstenholme, T. Conard, Applied Surface Science 252 (2006) 8270–8276 [CrossRef] [Google Scholar]
- M. L. Green, M.-Y. Ho, B. Busch, G. D. Wilk, T. Sorsch, T. Conard, B. Brijs, W. Vandervorst, P. I. Räiisänen, D. Muller, M. Bude, and J. Grazul, J. Appl. Phys., Vol. 92, No. 12, 15 December 2002, 7168 [CrossRef] [Google Scholar]
- T. Conard, W. Vandervorst, W (Vandervorst, W.) A. Bergmaier, K. Kimura, K; JVST A, Vol. 30; 31509, 2012 [Google Scholar]
- K. Kimura, K. Nakajima, M. Zhao, H. Nohira, T. Hattori, M. Kobata, E. Ikenaga, J.J Kim, K. Kobayashi, T. Conard. and W. Vandervorst, Surf. Interface Anal. 2008; 40: 423–426 [Google Scholar]
- A. Herrera-Gomez et al. Surf. Interface Anal. 2009, 41, 840–857 [Google Scholar]
- Takashi Ando, Materials 2012, 5, 478-500 [Google Scholar]
- https://www.kratos.com/products/axis-supra-xps-surface-analysis-instrument [Google Scholar]
- https://www.ulvac-phi.com/en/products/xps/quantes/ [Google Scholar]
- https://scientaomicron.com/en/systemsolutions/electron-spectroscopy/HAXPES-Lab [Google Scholar]
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