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Cited article:

聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展(特邀)

侯长余 HOU Changyu, 吴涛 WU Tao, 李凯强 LI Kaiqiang, 周平 ZHOU Ping and 郭东明 GUO Dongming
Infrared and Laser Engineering 54 (9) 20250336 (2025)
https://doi.org/10.3788/IRLA20250336