Article references

Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements

Jan Krüger, Rainer Köning, Bernd Bodermann

EPJ Web Conf., 238 (2020) 06010

Published online: 2020-08-20

DOI: https://doi.org/10.1051/epjconf/202023806010

This article has been cited by the following article(s):

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

Yuki Shimizu
Nanomanufacturing and Metrology 4 (1) 3 (2021)
https://doi.org/10.1007/s41871-020-00083-2

Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer

Xin Xiong, Lue Quan, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
Measurement Science and Technology 32 (6) 064005 (2021)
https://doi.org/10.1088/1361-6501/abe9de