EPJ Web Conf.
Volume 238, 2020EOS Annual Meeting (EOSAM 2020)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 6- Frontiers in Optical Metrology|
|Published online||20 August 2020|
Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig
* Corresponding author: firstname.lastname@example.org
Published online: 20 August 2020
In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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