| Issue |
EPJ Web Conf.
Volume 238, 2020
EOS Annual Meeting (EOSAM 2020)
|
|
|---|---|---|
| Article Number | 06011 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 6- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202023806011 | |
| Published online | 20 August 2020 | |
https://doi.org/10.1051/epjconf/202023806011
Absolute distance interferometry for subaperture stitching of large freeform optics
Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
∗ e-mail: jan.spichtinger@ptb.de
Published online: 20 August 2020
We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.
© The Authors, published by EDP Sciences, 2020
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