EPJ Web Conf.
Volume 238, 2020EOS Annual Meeting (EOSAM 2020)
|Number of page(s)||2|
|Section||Topical Meeting (TOM) 6- Frontiers in Optical Metrology|
|Published online||20 August 2020|
Absolute distance interferometry for subaperture stitching of large freeform optics
Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
∗ e-mail: firstname.lastname@example.org
Published online: 20 August 2020
We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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