| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10003 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610003 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610003
Characterisation of nanowire structures with scatterometric and ellipsometric measurements
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
* Corresponding author: jana.grundmann@ptb.de
Published online: 13 October 2022
Nanowire structures arranged in a hexagonal lattice are to be characterized in terms of their diameter, height and pitch. A scatterometer and an imaging Mueller matrix ellipsometer, which is a combination of a commercial Mueller matrix ellipsometer and a microscope, have been used as measurement tools. These measurements are supported by numerical simulations using the finite element method to characterize the structure parameters.
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