| Issue |
EPJ Web Conf.
Volume 309, 2024
EOS Annual Meeting (EOSAM 2024)
|
|
|---|---|---|
| Article Number | 02010 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 2- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202430902010 | |
| Published online | 31 October 2024 | |
https://doi.org/10.1051/epjconf/202430902010
Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
* e-mail: jana.grundmann@ptb.de
Published online: 31 October 2024
An imaging Mueller matrix ellipsometer is used to measure structures in measuring fields in the micrometre range, which are too small for conventional ellipsometry. Line and grid structures are measured and evaluated with the help of numerical simulations using the finite element method to characterize the structure parameters.
© The Authors, published by EDP Sciences, 2024
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