| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10007 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610007 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610007
Nanoform evaluation approach using Mueller matrix microscopy and machine learning concepts
1 Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
2 Institut für Halbleitertechnik, Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany
* Corresponding author: tim.kaeseberg@ptb.de
Published online: 13 October 2022
We realized an imaging Mueller matrix microscope for nanostructure characterization. For investigations on nanoform characterization via Mueller matrix images, we measured and simulated Mueller matrix images of specially designed nanostructures. As an approach towards machine learning evaluation in imaging ellipsometry, we calculated Haar-like features of the images and observed a higher sensitivity to subwavelength features in off-diagonal matrix elements compared to microscopy.
© The Authors, published by EDP Sciences
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.