| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10006 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610006 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610006
Polarization dependency of the 3D transfer behavior in microsphere enhanced interferometry
Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, 34121 Kassel, Germany
* e-mail: lucie.hueser@uni-kassel.de
Published online: 13 October 2022
Enhancing the lateral resolution limit in optical microscopy and interferometry is of great interest in recent research. In order to laterally resolve structures including feature dimensions below the resolution limit, microspheres applied in the optical near-field of the specimen are shown to locally improve the resolution of the imaging system. Experimental and simulated results following this approach obtained by a high NA Linnik interferometer are analyzed in this contribution. For further understanding of the transfer characteristics, measured interference data are compared with FEM (finite element method) based simulations with respect to the polarization dependency of the relevant image information.
© The Authors, published by EDP Sciences
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