| Issue |
EPJ Web Conf.
Volume 309, 2024
EOS Annual Meeting (EOSAM 2024)
|
|
|---|---|---|
| Article Number | 02015 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 2- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202430902015 | |
| Published online | 31 October 2024 | |
https://doi.org/10.1051/epjconf/202430902015
Modeling microcylinder-assisted conventional, interference and confocal microscopy
Measurement Technology Group, Faculty of Electrical Engineering and Computer Science, University of Kassel, Wilhelmshöher Allee 71, Kassel 34121, Germany
* e-mail: tobias.pahl@uni-kassel.de
Published online: 31 October 2024
We present how to develop virtual microcylinder- or microsphere-assisted surface topography measurement instruments. As the most critical part, the interaction between light, microcylinder and measurement object is considered based on the finite element method (FEM). Results are obtained for microcylinder-assisted conventional, interference, and confocal microscopes without necessity to repeat the time-consuming FEM simulations for each sensor.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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