| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10008 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610008 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610008
Particle detection enhancement by combining coherent Fourier scatterometry with synthetic optical holography
Optics Research Group, Imaging Physics Department, Faculty of Applied Sciences, Delft University of Technology Lorentzweg 1, 2628 CJ, Delft, The Netherlands
Published online: 13 October 2022
By combining coherent Fourier scatterometry (CFS) with synthetic optical holography (SOH) we show that the sensitivity of detection of isolated nanoparticles on surfaces can be substantially increased. This improvement is a result of the boost in the signal at the detector due to the added reference beam, and the reduction of background noise caused by the electronics. We demonstrate an improvement of sensitivity of about 4 dB for the case of detection of a 60 nm polystyrene latex (PSL) particle on a silicon wafer at the wavelength of 633 nm (∼ λ/10).
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