| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 10009 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 10- Frontiers in Optical Metrology | |
| DOI | https://doi.org/10.1051/epjconf/202226610009 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226610009
Alignment autocollimator-based microscope adjustment and its quality assessment
Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
* Corresponding author: jan.krueger@ptb.de
Published online: 13 October 2022
We report a custom microscope setup whose mechanical and optical components are adjusted by the means of an alignment autocollimator (AAC). Residual centring and angular misalignments of the components towards the microscope’s optical axis are below 500 μm and 1 mrad, respectively. We further perform measurements of dot structures with diameters close to the diffraction limit (nominal diameter = 200 nm; chrome on glass mask) as suitable measures for the evaluation of the microscope’s adjustment and to determine/ visualize the optical aberrations, which affect the image formation of microscopes.
© The Authors, published by EDP Sciences
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