Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy

¹ JCMwave GmbH, Bolivarallee 22, 14050 Berlin, Germany
² Zuse Institute Berlin, Takustraße 7, 14195 Berlin, Germany
³ Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany

^* e-mail: phillip.manley@jcmwave.com

Published online: 13 October 2022

Abstract

Dimensional microscopy is an essential tool for non-destructive and fast inspection of manufacturing processes. Standard approaches process only the measured images. By modelling the imaged structure and solving an inverse problem, the uncertainty on dimensional estimates can be reduced by orders of magnitude. At the same time, the inverse problem needs to be solved in a timely manner. Here we present a method of accelerating the inverse problem by reducing images to their elementary features, thereby extracting the relevant information and distinguishing it from noise. The resulting reduction in complexity allows the inverse problem to be solved more efficiently by utilize cutting edge machine learning based optimization techniques. By employing the techniques presented here, we are able to perform for highly accurate and fast dimensional microscopy.