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Cited article:

One-step 3D microstructuring of PMMA using MeV light ions

Oleksandr Romanenko, Adela Jagerova, Andrei Borodkin, Vladimir Havranek, Anna Mackova

EPJ Web Conf., 261 (2022) 02001

Published online: 2022-04-11

DOI: https://doi.org/10.1051/epjconf/202226102001

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Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film

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