| Issue |
EPJ Web Conf.
Volume 261, 2022
Applied Nuclear Physics Conference (ANPC 2021)
|
|
|---|---|---|
| Article Number | 02001 | |
| Number of page(s) | 6 | |
| Section | Ion and Neutron Beam Irradiation of Materials | |
| DOI | https://doi.org/10.1051/epjconf/202226102001 | |
| Published online | 11 April 2022 | |
https://doi.org/10.1051/epjconf/202226102001
One-step 3D microstructuring of PMMA using MeV light ions
1
Nuclear Physics Institute, Czech Academy of Sciences, 25068 Rez, Czech Republic
2
J. E. Purkinje University, 40096 Usti nad Labem, Czech Republic
3
Institute of Photonics and Electronics, Czech Academy of Sciences, 18251 Prague, Czech Republic
* Corresponding author: romanenko@ujf.cas.cz
Published online: 11 April 2022
The conventional procedure for creating 3D microstructures in resists by ion beam lithography consists of two stages – exposure and developing. However, single stage of manufacturing 3D structures in resist is also possible. Irradiation of PMMA can cause it to shrink. This feature of the polymer can be used for one-step three-dimensional microstructuring, which simplifies the manufacturing process. The shrinkage of PMMA film on a substrate has been extensively studied, while research on free-standing film is not comprehensive. The use of free-standing PMMA film allows the creation of a flexible material with 3D microstructures, which can be used in medicine, optics, and electronics. The question here is whether the results obtained for the PMMA film on the substrate are applicable to the freestanding film. Since the nature of shrinking is outgassing of volatile products, the film on the substrate has only one surface for the release of gases, while in the free-standing film, gases can be released from the sample from both sides. Therefore, the shrinking in the free-standing film occurs on both sides. The aim of this work is to study the shrinkage of the free-standing film and compare it with that of the film of the same thickness coated on the substrate.
© The Authors, published by EDP Sciences, 2022
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.