The multi-energetic Au ion implantation of graphene oxide and polymers

¹ Nuclear Physics Institute of the Czech Academy of Sciences, v. v. i., 250 68 Rez, Czech Republic
² Department of Physics, Faculty of Science, J.E. Purkinje University, Pasteurova 15, 400 96 Usti nad Labem, Czech Republic
³ Department of Solid State Engineering, University of Chemistry and Technology, 166 28 Prague, Czech Republic
⁴ Department of Inorganic Chemistry, University of Chemistry and Technology, 166 28 Prague, Czech Republic

^* Corresponding author: malinsky@ujf.cas.cz

Published online: 11 April 2022

Abstract

The electric properties of polymers are increasingly important in a wide range of applications such as sensors, energy storages, microelectronics, and filtration membranes among others. In this work, the effect of multi-energetic Au ion implantation on the graphene oxide (GO), polyimide (PI), polyethylene terephthalate (PET) and polylactide (PLLA) elemental, chemical, structural end electric properties is presented with potential application in 3D metal-dielectric structure synthetization. The three energies, 3.2, 1.6, 0.8 MeV of Au ions with fluence 3.75×10¹⁴ cm^-2 were used in ascending or descending order to create two sample sets, which were subsequently analysed by RBS, ERDA, EDS and AFM. RBS analysis was used for Au-depth profile characterization in the implanted samples, the profiles agree reasonably with those simulated by SRIM code. Electrical properties were investigated by standard two-point technique with respect to the used parameters of the ion irradiation. The sheet resistance decreases after ion irradiation and it is evident that the ascending order of ion implantation energies has more significant effect on the conductivity enhancement compare to the descending one.