Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Laser micromachining of acoustic chambers for optical microphones

David Bischof, Marco Roth, Fabian Alder, Reto Besserer, Tina Strüning and Markus Michler
tm - Technisches Messen (2026)
https://doi.org/10.1515/teme-2025-0111

David Bischof, Sven Lämmler, Hansruedi Moser, Martin Forrer, Oliver Faehnle, Helge Thieß, Gerald Fütterer, Christine Wünsche, Oliver W. Fähnle and Alexander Haberl
14 (2024)
https://doi.org/10.1117/12.3034606