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Cited article:

New DRIE-Patterned Electrets for Vibration Energy Harvesting

S. Boisseau, A.-B. Duret, J.-J. Chaillout, G. Despesse

EPJ Web of Conferences, 33 (2012) 02010

Published online: 2012-10-02

DOI: https://doi.org/10.1051/epjconf/20123302010

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