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Cited article:

Plasma jet assisted polishing of fused silica freeform optics

Thomas Arnold, Georg Boehm, Heike Mueller, Martin Ehrhardt, Klaus Zimmer

EPJ Web Conf., 266 (2022) 03001

Published online: 2022-10-13

DOI: https://doi.org/10.1051/epjconf/202226603001

This article has been cited by the following article(s):

Development and Performance Evolution of Medium-Pressure He/SF6/O2-Based Plasma and Wet Chemical Etching Process for Surface Modification of Fused Silica

Hari Narayan Singh Yadav and Manas Das
Plasma Chemistry and Plasma Processing 44 (2) 1083 (2024)
https://doi.org/10.1007/s11090-024-10447-x