| Issue |
EPJ Web Conf.
Volume 266, 2022
EOS Annual Meeting (EOSAM 2022)
|
|
|---|---|---|
| Article Number | 03001 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 3- Optical System Design, Tolerancing and Manufacturing | |
| DOI | https://doi.org/10.1051/epjconf/202226603001 | |
| Published online | 13 October 2022 | |
https://doi.org/10.1051/epjconf/202226603001
Plasma jet assisted polishing of fused silica freeform optics
1 Technische Universität Dresden, Institut für Fertigungstechnik, 01062 Dresden, Germany
2 Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany
3 Trionplas Technologies GmbH, Permoserstr. 15, Leipzig, Germany
* Corresponding author: thomas.arnold@iom-leipzig.de
Published online: 13 October 2022
Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redistribution of the material. An accurate temperature regime during the process is inevitable to achieve a uniformly smoothed surface. The possibilities for inȭprocess temperature control are demonstrated. Surface roughness values can be significantly reduced by a factor of 1000 depending on the initial roughness of the ground surface.
© The Authors, published by EDP Sciences
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