| Issue |
EPJ Web Conf.
Volume 238, 2020
EOS Annual Meeting (EOSAM 2020)
|
|
|---|---|---|
| Article Number | 03001 | |
| Number of page(s) | 2 | |
| Section | Topical Meeting (TOM) 3- Optical System Design, Tolerancing and Manufacturing | |
| DOI | https://doi.org/10.1051/epjconf/202023803001 | |
| Published online | 20 August 2020 | |
https://doi.org/10.1051/epjconf/202023803001
Advances in precision freeform manufacturing by plasma jet machining -INVITED
1 Technische Universität Dresden, Institut für Fertigungstechnik, 01062 Dresden, Germany
2 Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany
* Corresponding author: thomas.arnold@iom-leipzig.de
Published online: 20 August 2020
Atmospheric pressure plasma jet machining technology provides a flexible and efficient way to fabricate precise freeform optics. Due to the pure chemical material removal mechanism based on a dry etching process using fluorine containing gas, the choice of materials that can be treated is limited. Fused silica, Si, SiC or ULE® are easy to machine since the etching products formed are solely volatile. Recently, plasma jet machining has been also adopted to treat optical glasses like N-BK7® which contain amongst others alkali metals that form a solid residual layer during etching. In the paper a new approach to apply deterministic plasma jet etching on optical glass coping with complex etch characteristics caused by the residual layer is introduced.
© The Authors, published by EDP Sciences, 2020
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