EPJ Web of Conferences

Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

G. De Pasquale, E. Brusa and A. Somà

EPJ Web of Conferences, 6 (2010) 06001

Published online: 10 June 2010

DOI: 10.1051/epjconf/20100606001

G. De Pasquale

E. Brusa

A. Somà

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