EPJ Web of Conferences
Volume 6, 2010ICEM 14 – 14th International Conference on Experimental Mechanics
|Number of page(s)||2|
|Section||Mechanics of MEMS|
|Published online||10 June 2010|
Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue
This article has no abstract.
© Owned by the authors, published by EDP Sciences, 2010
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