Issue |
EPJ Web of Conferences
Volume 6, 2010
ICEM 14 – 14th International Conference on Experimental Mechanics
|
|
---|---|---|
Article Number | 06001 | |
Number of page(s) | 2 | |
Section | Mechanics of MEMS | |
DOI | https://doi.org/10.1051/epjconf/20100606001 | |
Published online | 10 June 2010 |
https://doi.org/10.1051/epjconf/20100606001
Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue
Mechanical Department, Politecnico di Torino,
Corso Duca degli Abruzzi
24, 10129
Torino (Italy)
E-mail: giorgio.depasquale@polito.it, eugenio.brusa@polito.it,
aurelio.soma@polito.it
This article has no abstract.
© Owned by the authors, published by EDP Sciences, 2010
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