| Issue |
EPJ Web of Conferences
Volume 6, 2010
ICEM 14 – 14th International Conference on Experimental Mechanics
|
|
|---|---|---|
| Article Number | 06002 | |
| Number of page(s) | 6 | |
| Section | Mechanics of MEMS | |
| DOI | https://doi.org/10.1051/epjconf/20100606002 | |
| Published online | 10 June 2010 | |
https://doi.org/10.1051/epjconf/20100606002
Measurement of friction force between two mica surfaces with multiple beam interferometry
Department of Mechanical Engineering, National Cheng Kung
University, Taiwan
701,
Republic of China
Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
© Owned by the authors, published by EDP Sciences, 2010
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