EPJ Web of Conferences

Modelling of EUV light sources based on microwave discharge in inhomogeneous flow of nonequilibrium plasma with multiply charged tin and xenon ions

I.S. Abramov, E.D. Gospodchikov and A.G. Shalashov

EPJ Web Conf., 187 (2018) 01001

Published online: 03 September 2018

DOI: 10.1051/epjconf/201818701001

I.S. Abramov

E.D. Gospodchikov

A.G. Shalashov

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