EPJ Web Conf.
Volume 187, 201830th Joint Russian-German Meeting on ECRH and Gyrotrons
|Number of page(s)||2|
|Published online||03 September 2018|
Modelling of EUV light sources based on microwave discharge in inhomogeneous flow of nonequilibrium plasma with multiply charged tin and xenon ions
Institute of Applied Physics of Russian Academy of Sciences, Nizhny Novgorod, Russia
Published online: 3 September 2018
This article has no abstract.
© The Authors, published by EDP Sciences, 2018
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