EPJ Web of Conferences

Effect of Pad Elastic Modulus on The Polishing Induced Plastic Subsurface Damages Distribution of Fused Silica Optics

Xiang He, Chao Cai and Ping Ma

EPJ Web Conf., 215 (2019) 05001

Published online: 10 September 2019

DOI: 10.1051/epjconf/201921505001

Xiang He

Chao Cai

Ping Ma

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