EPJ Web of Conferences

Figuring of optical aluminium devices by reactive ion beam etching

Jens Bauer, Melanie Ulitschka, Frank Frost and Thomas Arnold

EPJ Web Conf., 215 (2019) 06002

Published online: 10 September 2019

DOI: 10.1051/epjconf/201921506002

Jens Bauer

Melanie Ulitschka

Frank Frost

Thomas Arnold

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