EPJ Web of Conferences

Method for determination of resists parameters for photonic - integrated circuits e-beam lithography on silicon nitride platform

Ilia Elmanov, Anna Elmanova, Sophia Komrakova, Alexander Golikov, Natalya Kaurova, Vadim Kovalyuk and Gregory Goltsman

EPJ Web Conf., 220 (2019) 03012

Published online: 25 October 2019

DOI: 10.1051/epjconf/201922003012

Ilia Elmanov

Anna Elmanova

Sophia Komrakova

Alexander Golikov

Natalya Kaurova

Vadim Kovalyuk

Gregory Goltsman

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)