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Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors

Xesús Prieto-Blanco, Carlos Montero-Orille, Héctor González-Núñez, Vicente Moreno, Manuel P. Cagigal and Jesús Liñares

EPJ Web Conf., 238 (2020) 02004

Published online: 20 August 2020

DOI: 10.1051/epjconf/202023802004

Xesús Prieto-Blanco

Carlos Montero-Orille

Héctor González-Núñez

Vicente Moreno

Manuel P. Cagigal

Jesús Liñares

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