EPJ Web of Conferences

Imaging Mueller matrix ellipsometry setup for optical nanoform metrology

Tim Käseberg, Jana Grundmann, Johannes Dickmann, Stefanie Kroker and Bernd Bodermann

EPJ Web Conf., 238 (2020) 06006

Published online: 20 August 2020

DOI: 10.1051/epjconf/202023806006

Tim Käseberg

Jana Grundmann

Johannes Dickmann

Stefanie Kroker

Bernd Bodermann

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