Enhanced thin film analysis via High Resolution RBS using the NEC CARBS system Thomas Pollock, Eric Alderson, Kevin Berk, Levon McQuown, Ilya Kostanovskiy, Peng Wang, Dmitry Knyazev and Stuart S. P. Parkin EPJ Web Conf., 261 (2022) 01006 Published online: 11 April 2022 DOI: 10.1051/epjconf/202226101006