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Optical methods for measuring the feature size of optical diffraction gratings with nano-meter accuracy and implementation of suitable feedback control loops

Thomas Flügel-Paul, Martin Heusinger, Kristin Gerold, Adriana Szeghalmi and Uwe Zeitner

EPJ Web Conf., 266 (2022) 03008

Published online: 13 October 2022

DOI: 10.1051/epjconf/202226603008

Thomas Flügel-Paul

Martin Heusinger

Kristin Gerold

Adriana Szeghalmi

Uwe Zeitner

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